CAMBIA Patent Lens Search - (front_page:G03F*)

MEANS FOR TRANSFERRING A PATTERN TO AN OBJECT

Wed, 06 Mar 2013 00:00:00 GMT

Title	MEANS FOR TRANSFERRING A PATTERN TO AN OBJECT
Publication number	EP_1875310_B1
Publication date	2013-03-06
Filing number	06743293.0
Filing date	2006-04-13

Lithographic apparatus, projection assembly and active damping

Wed, 06 Mar 2013 00:00:00 GMT

Title	Lithographic apparatus, projection assembly and active damping
Publication number	EP_2045664_B1
Publication date	2013-03-06
Filing number	08165761.1
Filing date	2008-10-02

Exposure apparatus

Wed, 06 Mar 2013 00:00:00 GMT

Title	Exposure apparatus
Publication number	EP_2278402_B1
Publication date	2013-03-06
Filing number	10189857.5
Filing date	2004-08-26

Stereolithographic resins with high temperature and high impact resistance

Wed, 06 Mar 2013 00:00:00 GMT

Title	Stereolithographic resins with high temperature and high impact resistance
Publication number	EP_1385055_B2
Publication date	2013-03-06
Filing number	03254460.3
Filing date	2003-07-16

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD

Wed, 06 Mar 2013 00:00:00 GMT

Title	EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD
Publication number	EP_1768169_B9
Publication date	2013-03-06
Filing number	05745697.2
Filing date	2005-06-03

Stage system and stage driving method for use in exposure apparatus

Wed, 27 Feb 2013 00:00:00 GMT

Title	Stage system and stage driving method for use in exposure apparatus
Publication number	EP_0977244_B1
Publication date	2013-02-27
Filing number	99306002.9
Filing date	1999-07-28

Lihographic apparatus and device manufaturing method

Wed, 27 Feb 2013 00:00:00 GMT

Title	Lihographic apparatus and device manufaturing method
Publication number	EP_1369745_B1
Publication date	2013-02-27
Filing number	03253564.3
Filing date	2003-06-05

Stencil mask for ion implantation

Wed, 27 Feb 2013 00:00:00 GMT

Title	Stencil mask for ion implantation
Publication number	EP_1487005_B1
Publication date	2013-02-27
Filing number	04253079.0
Filing date	2004-05-25

Lithographic apparatus and gas flow conditioner

Wed, 27 Feb 2013 00:00:00 GMT

Title	Lithographic apparatus and gas flow conditioner
Publication number	EP_1650603_B1
Publication date	2013-02-27
Filing number	05077375.3
Filing date	2005-10-14

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Wed, 27 Feb 2013 00:00:00 GMT

Title	EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number	EP_1670043_B1
Publication date	2013-02-27
Filing number	04788458.0
Filing date	2004-09-29

Photosensitive composition, and lithographic printing plate precursor and image-recording method using the same

Wed, 27 Feb 2013 00:00:00 GMT

Title	Photosensitive composition, and lithographic printing plate precursor and image-recording method using the same
Publication number	EP_1764650_B1
Publication date	2013-02-27
Filing number	06019677.1
Filing date	2006-09-20

Method and material for cleaning a substrate

Wed, 27 Feb 2013 00:00:00 GMT

Title	Method and material for cleaning a substrate
Publication number	EP_1803804_B1
Publication date	2013-02-27
Filing number	06256133.7
Filing date	2006-11-30

Photopolymerization type photosensitive lithographic printing plate precursor

Wed, 27 Feb 2013 00:00:00 GMT

Title	Photopolymerization type photosensitive lithographic printing plate precursor
Publication number	EP_1906245_B1
Publication date	2013-02-27
Filing number	07019170.5
Filing date	2007-09-28

Inkjet printer head comprising photosensitive polymer complex containing silver nanoparticles and method of preparing the photosensitive polymer complex

Wed, 27 Feb 2013 00:00:00 GMT

Title	Inkjet printer head comprising photosensitive polymer complex containing silver nanoparticles and method of preparing the photosensitive polymer complex
Publication number	EP_1942375_B1
Publication date	2013-02-27
Filing number	07150275.1
Filing date	2007-12-20

OXIME ESTER PHOTOINITIATORS

Wed, 27 Feb 2013 00:00:00 GMT

Title	OXIME ESTER PHOTOINITIATORS
Publication number	EP_1957457_B1
Publication date	2013-02-27
Filing number	06819316.8
Filing date	2006-11-08

MANUFACTURING A REPLICATION TOOL

Wed, 27 Feb 2013 00:00:00 GMT

Title	MANUFACTURING A REPLICATION TOOL
Publication number	EP_2033050_B1
Publication date	2013-02-27
Filing number	07720180.4
Filing date	2007-06-06

Computer generated hologram, exposure apparatus and device fabrication method

Wed, 27 Feb 2013 00:00:00 GMT

Title	Computer generated hologram, exposure apparatus and device fabrication method
Publication number	EP_2133755_B1
Publication date	2013-02-27
Filing number	09161275.4
Filing date	2009-05-27

Method of adapting the stray light of a projection objective for microlithography

Wed, 27 Feb 2013 00:00:00 GMT

Title	Method of adapting the stray light of a projection objective for microlithography
Publication number	EP_2165241_B1
Publication date	2013-02-27
Filing number	08784500.4
Filing date	2008-05-21

ILLUMINATION SYSTEM FOR SIZING FOCUSED SPOTS OF A PATTERNING SYSTEM FOR MASKLESS LITHOGRAPHY

Wed, 27 Feb 2013 00:00:00 GMT

Title	ILLUMINATION SYSTEM FOR SIZING FOCUSED SPOTS OF A PATTERNING SYSTEM FOR MASKLESS LITHOGRAPHY
Publication number	EP_2288964_B1
Publication date	2013-02-27
Filing number	09758711.7
Filing date	2009-05-29

REGULATION OF GASTROINTESTINAL MOTILITY

Wed, 27 Feb 2013 00:00:00 GMT

Title	REGULATION OF GASTROINTESTINAL MOTILITY
Publication number	EP_0966297_B2
Publication date	2013-02-27
Filing number	97938261.1
Filing date	1997-08-08

Lithographic apparatus

Wed, 20 Feb 2013 00:00:00 GMT

Title	Lithographic apparatus
Publication number	EP_1420298_B1
Publication date	2013-02-20
Filing number	03257070.7
Filing date	2003-11-10

RESIN COMPOSITION FOR PRINTING PLATE

Wed, 20 Feb 2013 00:00:00 GMT

Title	RESIN COMPOSITION FOR PRINTING PLATE
Publication number	EP_2100907_B1
Publication date	2013-02-20
Filing number	07851061.7
Filing date	2007-12-21

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Wed, 20 Feb 2013 00:00:00 GMT

Title	ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number	EP_2232334_B1
Publication date	2013-02-20
Filing number	08864764.9
Filing date	2008-12-19

A PHOTOSENSITIVE FLEXOGRAPHIC PRINTING ORIGINAL PLATE

Wed, 20 Feb 2013 00:00:00 GMT

Title	A PHOTOSENSITIVE FLEXOGRAPHIC PRINTING ORIGINAL PLATE
Publication number	EP_2287672_B1
Publication date	2013-02-20
Filing number	08874609.4
Filing date	2008-12-05

Dispersants for organic pigments

Wed, 13 Feb 2013 00:00:00 GMT

Title	Dispersants for organic pigments
Publication number	EP_1510556_B1
Publication date	2013-02-13
Filing number	04019844.2
Filing date	2004-08-20

BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES

Wed, 13 Feb 2013 00:00:00 GMT

Title	BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES
Publication number	EP_1573785_B1
Publication date	2013-02-13
Filing number	03774743.3
Filing date	2003-10-07

Exposure apparatus, method for producing device, and method for controlling exposure apparatus

Wed, 13 Feb 2013 00:00:00 GMT

Title	Exposure apparatus, method for producing device, and method for controlling exposure apparatus
Publication number	EP_2264535_B1
Publication date	2013-02-13
Filing number	10184336.5
Filing date	2004-07-26

NEGATIVE-WORKING IMAGEABLE LITHOGRAPHIC PRINTING PLATE PRECURSOR, METHODS OF USE, LITHOGRAPHIC PRINTING PLATE THEREOF

Wed, 13 Feb 2013 00:00:00 GMT

Title	NEGATIVE-WORKING IMAGEABLE LITHOGRAPHIC PRINTING PLATE PRECURSOR, METHODS OF USE, LITHOGRAPHIC PRINTING PLATE THEREOF
Publication number	EP_2310909_B1
Publication date	2013-02-13
Filing number	09788900.0
Filing date	2009-07-13

LOW-CONTAMINATION OPTICAL ARRANGEMENT

Wed, 13 Feb 2013 00:00:00 GMT

Title	LOW-CONTAMINATION OPTICAL ARRANGEMENT
Publication number	EP_2321700_B1
Publication date	2013-02-13
Filing number	09777796.5
Filing date	2009-08-11

Photosensitive compositions

Wed, 13 Feb 2013 00:00:00 GMT

Title	Photosensitive compositions
Publication number	EP_2341089_B1
Publication date	2013-02-13
Filing number	10197253.7
Filing date	2010-12-29

Gradient-assisted image resampling for microlithography

Wed, 13 Feb 2013 00:00:00 GMT

Title	Gradient-assisted image resampling for microlithography
Publication number	EP_2359192_B1
Publication date	2013-02-13
Filing number	09796348.2
Filing date	2009-12-04

Rotating arm for writing an image on a workpiece

Wed, 13 Feb 2013 00:00:00 GMT

Title	Rotating arm for writing an image on a workpiece
Publication number	EP_2359193_B1
Publication date	2013-02-13
Filing number	09799062.6
Filing date	2009-12-04

ROTOR IMAGING SYSTEM AND METHOD WITH VARIABLE-RATE PIXEL CLOCK

Wed, 13 Feb 2013 00:00:00 GMT

Title	ROTOR IMAGING SYSTEM AND METHOD WITH VARIABLE-RATE PIXEL CLOCK
Publication number	EP_2404219_B1
Publication date	2013-02-13
Filing number	10706670.6
Filing date	2010-03-05

RADIATION CURABLE RESIN COMPOSITION AND RAPID PROTOTYPING PROCESS USING THE SAME

Wed, 30 Jan 2013 00:00:00 GMT

Title	RADIATION CURABLE RESIN COMPOSITION AND RAPID PROTOTYPING PROCESS USING THE SAME
Publication number	EP_1502155_B1
Publication date	2013-01-30
Filing number	03721169.5
Filing date	2003-05-01

Exposure apparatus and device manufacturing method

Wed, 30 Jan 2013 00:00:00 GMT

Title	Exposure apparatus and device manufacturing method
Publication number	EP_1569036_B1
Publication date	2013-01-30
Filing number	05251193.8
Filing date	2005-02-28

Lithographic projection apparatus, control apparatus and device manufacturing method

Wed, 30 Jan 2013 00:00:00 GMT

Title	Lithographic projection apparatus, control apparatus and device manufacturing method
Publication number	EP_1835349_B1
Publication date	2013-01-30
Filing number	07103905.1
Filing date	2007-03-12

Light source apparatus and exposure apparatus having the same

Wed, 23 Jan 2013 00:00:00 GMT

Title	Light source apparatus and exposure apparatus having the same
Publication number	EP_1589792_B1
Publication date	2013-01-23
Filing number	05252408.9
Filing date	2005-04-18

Extended lifetime excimer laser optics

Wed, 23 Jan 2013 00:00:00 GMT

Title	Extended lifetime excimer laser optics
Publication number	EP_1739801_B1
Publication date	2013-01-23
Filing number	06013421.0
Filing date	2006-06-29

Projection exposure apparatus for EUV lithography

Wed, 23 Jan 2013 00:00:00 GMT

Title	Projection exposure apparatus for EUV lithography
Publication number	EP_1927032_B1
Publication date	2013-01-23
Filing number	07818215.1
Filing date	2007-09-18

IMAGING OPTICS

Wed, 23 Jan 2013 00:00:00 GMT

Title	IMAGING OPTICS
Publication number	EP_2297612_B1
Publication date	2013-01-23
Filing number	09776780.0
Filing date	2009-06-18

PROCESS FOR PRODUCING CYLINDRICAL PRINTING PLATE PRECURSOR FOR LASER ENGRAVING

Wed, 23 Jan 2013 00:00:00 GMT

Title	PROCESS FOR PRODUCING CYLINDRICAL PRINTING PLATE PRECURSOR FOR LASER ENGRAVING
Publication number	EP_2301759_B1
Publication date	2013-01-23
Filing number	09762556.0
Filing date	2009-06-12

Method and apparatus for reconstruction of microscopic structures

Wed, 23 Jan 2013 00:00:00 GMT

Title	Method and apparatus for reconstruction of microscopic structures
Publication number	EP_2302360_B1
Publication date	2013-01-23
Filing number	10175689.8
Filing date	2010-09-08

EMPLOYING SECONDARY BACK EXPOSURE OF FLEXOGRAPHIC PLATE

Wed, 23 Jan 2013 00:00:00 GMT

Title	EMPLOYING SECONDARY BACK EXPOSURE OF FLEXOGRAPHIC PLATE
Publication number	EP_2313270_B1
Publication date	2013-01-23
Filing number	09788958.8
Filing date	2009-07-21

Chemically amplified negative resist composition and patterning process

Wed, 23 Jan 2013 00:00:00 GMT

Title	Chemically amplified negative resist composition and patterning process
Publication number	EP_2362267_B1
Publication date	2013-01-23
Filing number	11001591.4
Filing date	2011-02-25

Polymer, chemically amplified positive resist compositions and pattern forming process

Wed, 23 Jan 2013 00:00:00 GMT

Title	Polymer, chemically amplified positive resist compositions and pattern forming process
Publication number	EP_2362268_B1
Publication date	2013-01-23
Filing number	11001592.2
Filing date	2011-02-25

Process for developing lithographic printing plate

Wed, 16 Jan 2013 00:00:00 GMT

Title	Process for developing lithographic printing plate
Publication number	EP_1403716_B1
Publication date	2013-01-16
Filing number	03022141.0
Filing date	2003-09-30

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DEVICE

Wed, 16 Jan 2013 00:00:00 GMT

Title	EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DEVICE
Publication number	EP_1796146_B1
Publication date	2013-01-16
Filing number	05783623.1
Filing date	2005-09-16

METHOD FOR PREPARING A LARGE GLASS SUBSTRATE FOR A PHOTOMASK, METHOD FOR EXPOSING A MOTHER GLASS, AND COMPUTER READABLE RECORDING MEDIUM

Wed, 16 Jan 2013 00:00:00 GMT

Title	METHOD FOR PREPARING A LARGE GLASS SUBSTRATE FOR A PHOTOMASK, METHOD FOR EXPOSING A MOTHER GLASS, AND COMPUTER READABLE RECORDING MEDIUM
Publication number	EP_1829836_B1
Publication date	2013-01-16
Filing number	06766585.1
Filing date	2006-06-12

Method for resist pattern formation, and process for device prodution

Wed, 16 Jan 2013 00:00:00 GMT

Title	Method for resist pattern formation, and process for device prodution
Publication number	EP_1865379_B1
Publication date	2013-01-16
Filing number	07108733.2
Filing date	2007-05-23

PHOTORESIST COMPOSITION FOR IMAGING THICK FILMS

Wed, 16 Jan 2013 00:00:00 GMT

Title	PHOTORESIST COMPOSITION FOR IMAGING THICK FILMS
Publication number	EP_1913444_B1
Publication date	2013-01-16
Filing number	06779859.5
Filing date	2006-07-07